1. Mechanical microsensors
Author: M. Elwenspoek, R.J. Wiergerink
Library: Central Library Yasuj University (Kohgiluye va Buyer ahmad)
Subject: Detectors- Design and construction,Microelectromechanical systems- Design and construction,Transducers,Silicon,Micromachining
Classification :
681
,.
2
,
E49
